YBaCuO Epitaxial Film Formation by Magnetron Sputtering with Facing Targets I. Effects of Target and Substrate Positions
- 1 May 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (5R)
- https://doi.org/10.1143/jjap.30.939
Abstract
YBa2Cu3O7-δ (YBCO) thin films were prepared on non-rotating MgO(100) substrates at 630°C using dc magnetron sputtering with facing targets (dc-MSFT) and the influence of target and substrate positions on film characteristics, such as superconducting properties, composition (C Cu/Y, C Ba/Y), crystallinity and uniformity was investigated. Spatial positions at which as-grown epitaxial films with T ce=90 K were deposited were consequently found. Away from the center position, the composition of thin film deviated from a stoichiometric composition, that is, both C Cu/Y and C Ba/Y had a tendency to decrease. As-grown films with of T ce over 88 K were obtained in a 5×5 cm2 area of the substrate. The deposition rate was about 20 Å/min at the center position and decreased by 22% at a position 2.5 cm away from the center.Keywords
This publication has 16 references indexed in Scilit:
- Superconducting and Structural Properties of EuBa2Cu3O7-δ Ultrathin Films Deposited on MgO(100) Substrates Using Magnetron SputteringJapanese Journal of Applied Physics, 1990
- Epitaxy and Orientation of Eu1Ba2Cu3O7-y Films Grown In Situ by Magnetron SputteringJapanese Journal of Applied Physics, 1989
- As-Grown Y-Ba-Cu-O Superconducting Thin Films Prepared by Magnetron SputteringJapanese Journal of Applied Physics, 1989
- Sputter Synthesis of Ba2YCu3Oy As-Deposited Superconducting Thin Films from Stoichiometric Target–A Mechanism of Compositional Deviation and Its ControlJapanese Journal of Applied Physics, 1988
- Single-Crystal YBa2Cu3O7-x Thin Films by Activated Reactive EvaporationJapanese Journal of Applied Physics, 1988
- Single-phase 60-K bulk superconductor in annealed with correlated oxygen vacancies in the Cu-O chainsPhysical Review B, 1987
- Epitaxial ordering of oxide superconductor thin films on (100) SrTiO3 prepared by pulsed laser evaporationApplied Physics Letters, 1987
- Synthesis of Y-Ba-Cu-O Thin Films on Sapphire Substrates by RF Magnetron SputteringJapanese Journal of Applied Physics, 1987
- Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressurePhysical Review Letters, 1987
- High TcSuperconductivity of La-Ba-Cu OxidesJapanese Journal of Applied Physics, 1987