Microfabrication of circuits for magnetic bubbles of diameter 1 μm and 2 μm
- 15 March 1976
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 28 (6), 355-357
- https://doi.org/10.1063/1.88757
Abstract
We describe microfabrication techniques for Permalloy circuits for magnetic bubbles of diameter 1 μm and 2 μm. Patterns are defined by electron beam on an x‐ray mask. X‐ray lithography and ion milling are employed to replicate the pattern in Permalloy.Keywords
This publication has 2 references indexed in Scilit:
- High speed replication of submicron features on large areas by X-ray lithographyIEEE Transactions on Electron Devices, 1975
- Material and submicron bubble device properties of (LuSm)3Fe5O12AIP Conference Proceedings, 1975