Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates
- 1 January 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Microwave Theory and Techniques
- Vol. 45 (10), 1961-1968
- https://doi.org/10.1109/22.641804
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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