Enhanced Diffusion of Ion Implanted Sb in Silicon
- 1 March 1970
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 9 (3)
- https://doi.org/10.1143/jjap.9.333
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Ion implantation in semiconductors—Part I: Range distribution theory and experimentsProceedings of the IEEE, 1968
- Ion Bombardment of Silicon in a Glow DischargeJournal of Applied Physics, 1963