Monolithic integration of waveguide polymer electrooptic modulators on VLSI circuitry
- 1 May 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 8 (5), 644-646
- https://doi.org/10.1109/68.491566
Abstract
We demonstrated some of the critical technology that is needed for the monolithic integration of polymer electrooptic modulators and VLSI circuitry by fabricating and testing a phase slab modulator on nonplanar VLSI circuits. We demonstrated the survival of GaAs MESFET's to the high-voltage poling and polymer modulator fabrication procedures. We also implemented an electrical interconnect scheme between the electronics and photonics layers.Keywords
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