Reduction of nodules in electron-gun-evaporated Au films

Abstract
When gold is evaporated from an electron beam source, spitting from the molten charge results in nodules on the deposited film. Au was evaporated from carbon and tungsten crucibles in an attempt to understand and reduce nodule formation. A carbon scum on the melt surface, nonwetting of crucible walls, and crucible surface roughness are all felt to contribute to nodule production. W-2% ThO2 crucibles with a 0.4 μ surface finish have been employed for Au evaporation, as they exhibit the following advantages: (1) Exceptionally long life and virtual indestructibility; (2) an evaporation rate 2–3 times higher than that for carbon crucibles; and (3) 15 nodules ≳ 13 μ diam per 100 cm2 substrate, at a deposition rate of 12 000 Å/min.