Superconducting Y1Ba2Cu3O7−x films on Si
- 18 July 1988
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 53 (3), 243-245
- https://doi.org/10.1063/1.100588
Abstract
By depositing YBaCuO films at low substrate holder temperatures (600 °C) using a pulsed laser, films with the orthorhombic phase exhibiting superconductivity with high zero resistance temperatures (Tc0) were produced. Tc0 values as high as 50 and 80 K were seen on films deposited directly on Si and on Si with only a 50 nm ZrO2 buffer layer, respectively. The key to the successful film deposition is the low processing temperatures involved, which minimized the interface reactions as observed by Auger electron spectrometry.Keywords
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