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Publications
Structure and properties of coevaporated WSi
x
films
Home
Publications
Structure and properties of coevaporated WSi
x
films
Structure and properties of coevaporated WSi
x
films
KA
K. Y. Ahn
K. Y. Ahn
SH
S. R. Herd
S. R. Herd
JB
J. E. E. Baglin
J. E. E. Baglin
JH
J. U. Han
J. U. Han
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1 November 1985
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 3
(6)
,
2268-2271
https://doi.org/10.1116/1.572905
Abstract
No abstract available
Cited by 5 articles