Measurement of the sputtering yield by auger electron spectroscopy
- 31 October 1978
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 76-77, 188-189
- https://doi.org/10.1016/0022-3115(78)90134-4
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Light-ion sputtering yields for molybdenum and gold at low energiesJournal of Applied Physics, 1977
- Escape length of Auger electronsJournal of Applied Physics, 1973