Micromachining techniques were applied to construct biosensor systems. The micromachined biosensors have small size, low production cost, and good reproducibility. We made some detection units for flow injection analysis (FIA). An electrochemical flow cell was fabricated, and both the enzyme immobilized column and electrochemical detector were integrated onto the same chip. A chemiluminescence detector was also fabricated and applied to the determination of glucose and lactic acid contained in human serum and urine.