Surface enrichment of copper due to keV Xe sputtering of an Al-Cu mixture

Abstract

A surface enrichment of Cu due to keV Xe sputtering of Al‐Cu mixtures has been observed by high‐energy He ion backscattering and by Auger electron spectroscopy. The complementary nature of these two methods provides information on the total Cu enrichment (4.5×10¹⁵/cm²) and depth of the altered layer (∼300 Å).