A micro chemical analyzing system integrated on a silicon wafer
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid flow with voltage applied to the actuator. The liquid flow can be controlled from 0.1 mu l/min to 70 mu l/min. The results from integrating the three-way valve with a micropump to produce a flow injection analyzing system are discussed.<>Keywords
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