Infrared laser induced reaction of SF6 with silicon surfaces
- 1 June 1980
- journal article
- letter
- Published by AIP Publishing in The Journal of Chemical Physics
- Vol. 72 (11), 6303-6304
- https://doi.org/10.1063/1.439045
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Multiphoton Dissociation of Polyatomic MoleculesAnnual Review of Physical Chemistry, 1979
- Ion-surface interactions in plasma etchingJournal of Applied Physics, 1977