Hydrogen ion beam generated by a current-free double layer in a helicon plasma
- 19 January 2004
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 84 (3), 332-334
- https://doi.org/10.1063/1.1643548
Abstract
A current-free double layer in an expanding hydrogen helicon discharge (13.56 MHz) has been discovered by measuring a beam of hydrogen ions at the low potential side of the double layer. The ion beam is supersonic and is detected using a retarding field energy analyzer positioned downstream of the double layer for pressures below a few mTorr and for radio frequency powers up to 1800 W.
Keywords
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