Absolute pressure sensors by air-tight electrical feedthrough structure
- 30 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3), 1048-1052
- https://doi.org/10.1016/0924-4247(90)87087-y
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivityIEEE Transactions on Electron Devices, 1982