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Structural analysis of rf and dc sputtered Nb3Ge thin films containing oxygen
Home
Publications
Structural analysis of rf and dc sputtered Nb3Ge thin films containing oxygen
Structural analysis of rf and dc sputtered Nb3Ge thin films containing oxygen
EA
E. I. Alessandrini
E. I. Alessandrini
RL
R. B. Laibowitz
R. B. Laibowitz
CT
C. C. Tsuei
C. C. Tsuei
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1 March 1978
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 15
(2)
,
377-381
https://doi.org/10.1116/1.569551
Abstract
No abstract available
Cited by 4 articles