Determination of Argon in Thin Films by rf Spark-Source Mass Spectrography
- 1 December 1968
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 39 (13), 6106-6107
- https://doi.org/10.1063/1.1656128
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Gas Incorporation into Sputtered FilmsJournal of Applied Physics, 1967
- The Application of a Flash Discharge Lamp to the Determination of Impurities in Thin FilmsIEEE Transactions on Component Parts, 1964
- Ion Induced Reemission of Noble Gases from a Nickel SurfaceJournal of Applied Physics, 1958