Measurement of the velocity distribution of sputtered Na atoms from NaCl by Doppler shift laser fluorescence
- 1 November 1981
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 39 (9), 703-705
- https://doi.org/10.1063/1.92855
Abstract
The velocity distribution of sputtered Na atoms from NaCl during 15 keV, Ar+ bombardment was measured by a Doppler shift laser fluorescence technique. Contrary to other measurements, the sputtered Na atoms were found to have a velocity distribution identical to that of a three‐dimensional Maxwell–Boltzmann gas.Keywords
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