Growth of hydrogenated amorphous silicon carbide films from hydrocarbon gas of methane series mixed with silane and their properties
- 1 December 1983
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 59-60, 553-556
- https://doi.org/10.1016/0022-3093(83)90643-9
Abstract
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