Micro/Macrocavity Method Applied to the Study of the Step Coverage Formation Mechanism of SiO2 Films by LPCVD
- 1 April 1990
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 137 (4), 1222-1227
- https://doi.org/10.1149/1.2086636