Energy Levels and Solubility of Electrically Active Cobalt in Silicon Studied by Combined Hall and DLTS Measurements
- 1 March 1985
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 24 (3R), 373-374
- https://doi.org/10.1143/jjap.24.373
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Energy Level and Solid Solubility of Cobalt in Silicon by In-Depth Profile MeasurementJapanese Journal of Applied Physics, 1984
- Transition metals in siliconApplied Physics A, 1983
- Solid Solubility of Cobalt in SiliconJapanese Journal of Applied Physics, 1977
- Diffusion Coefficient of Cobalt in SiliconJapanese Journal of Applied Physics, 1977