Preparation and Ion-Beam-Induced Luminescence of Thermal CVD Diamond

Abstract

Diamond particles and thin films have been grown on (111) Si crystalline substrates at about 800°C using a thermal chemical-vapour-deposition method in CH₄ and H₂ gas mixtures. The identification of diamond particles was achieved directly through both scanning electron microscope and X-ray diffraction measurements; the crystallite size of individual diamond particles was found to be about 1 µm in diameter. The luminescence spectra induced by an Ar-ion beam in CVD diamond have been measured at room temperature for the first time. Three radiative emission bands appeared at about 320, 400 and 450 nm, in addition to sharp atomic lines resulting from C⁺, N⁺ and H⁺. By comparing them with the spectrum that appears in a natural diamond single crystal, the origin of the luminescence bands is discussed.