Very high Q-factor resonators in monocrystalline silicon
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3), 323-327
- https://doi.org/10.1016/0924-4247(90)85064-b
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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