Continuous Ellipsometric Determination of the Optical Constants and Thickness of a Silver Film during Deposition
- 1 May 1969
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 8 (5)
- https://doi.org/10.1143/jjap.8.559
Abstract
A method for obtaining the optical constants and thickness of thin metal films during deposition using an automatic recording ellipsometer is described. The restored azimuth ψ, the differential phase change on reflection Δ and the transmittance T have been continuously meaured during the film deposition. The optical constants and the packing factor are calculated from these three quantities and are given as functions of film thickness for various deposition conditions.Keywords
This publication has 14 references indexed in Scilit:
- A Computer-Operated Following EllipsometerApplied Optics, 1967
- An Automatic Retardation Meter for Automatic Polarimetry by Means of an ADP Polarization ModulatorApplied Optics, 1964
- Détermination simultanée des indices et de l'épaisseur des couches minces absorbantesJournal de Physique, 1964
- Photoelectric Measurement of Polarized Light by Means of an ADP Polarization Modulator I Photoelectric PolarimeterJournal of the Optical Society of America, 1961
- The Optical Constants of Thin Metallic Films Deposited by EvaporationProceedings of the Physical Society. Section B, 1952
- Ein photometrisches Präzisionsverfahren zur Messung absoluter Lichtphasen mit Hilfe eines phasengleichen GesichtsfeldesThe European Physical Journal A, 1952
- Die Bestimmung der optischen Konstanten und der Schichtdicke beliebig dicker Schichten mit Hilfe der absoluten PhaseThe European Physical Journal A, 1952
- Über optische Konstanten, elektrischen Widerstand und Struktur dünner MetallschichtenAnnalen der Physik, 1938
- Zur Optik dünner MetallfilmeThe European Physical Journal A, 1937
- Die optischen Konstanten durchsichtigen SilbersThe European Physical Journal A, 1933