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Secondary ion mass spectrometric image depth profiling for three-dimensional elemental analysis
Home
Publications
Secondary ion mass spectrometric image depth profiling for three-dimensional elemental analysis
Secondary ion mass spectrometric image depth profiling for three-dimensional elemental analysis
AP
Adam J. Patkin
Adam J. Patkin
GM
George H. Morrison
George H. Morrison
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1 January 1982
journal article
Published by
American Chemical Society (ACS)
in
Analytical Chemistry
Vol. 54
(1)
,
2-5
https://doi.org/10.1021/ac00238a005
Abstract
No abstract available
Keywords
MASS SPECTROMETERS
IMAGE PROCESSING
THREE DIMENSIONAL
IONS
SOLIDS
SURFACES
SAMPLING
ION IMPLANTATION
Cited by 37 articles