P(SI‐MA)/2‐Nitrobenzyl Cholate: A Two‐Level, Solution‐Inhibition, Deep‐UV Resist System
- 1 March 1987
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 134 (3), 653-657
- https://doi.org/10.1149/1.2100526