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Low-temperature dry etching
Home
Publications
Low-temperature dry etching
Low-temperature dry etching
ST
Shinichi Tachi
Shinichi Tachi
KT
Kazunori Tsujimoto
Kazunori Tsujimoto
SA
Shin Arai
Shin Arai
TK
Tokuo Kure
Tokuo Kure
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1 May 1991
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 9
(3)
,
796-803
https://doi.org/10.1116/1.577364
Abstract
No abstract available
Keywords
LOW TEMPERATURE DRY ETCHING
Cited by 120 articles