Optical emission spectroscopic studies of microwave enhanced diamond CVD using CH4/CO2 plasmas
- 31 May 2000
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 9 (3-6), 311-316
- https://doi.org/10.1016/s0925-9635(99)00196-x
Abstract
No abstract availableKeywords
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