Heteroepitaxial Growth of Si[sub x]Ge[sub 1]−[sub x] Alloys by Thermal Decomposition of SiH[sub 4] and GeH[sub 4]
- 1 January 1973
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 120 (4), 554-559
- https://doi.org/10.1149/1.2403499