Nano-precision measurement of diamond tool edge radius for wafer fabrication
- 22 September 2003
- journal article
- Published by Elsevier in Journal of Materials Processing Technology
- Vol. 140 (1-3), 358-362
- https://doi.org/10.1016/s0924-0136(03)00757-x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Ultra-Precision Cutting for ZKN7 GlassCIRP Annals, 2000
- Atomic force microscopy study of nanoindentation deformation and indentation size effect in MgO crystalsJournal of Materials Research, 1999
- Effect of Tool Edge Geometry on Energy Dissipation in Ultraprecision MachiningCIRP Annals, 1993
- Measuring the Very Small Cutting-Edge Radius for a Diamond Tool Using a New Kind of SEM Having Two DetectorsCIRP Annals, 1990