Single-molecule precursor chemistry for the deposition of chalcogenide(S or Se)-containing compound semiconductors by MOCVD and related methods

Abstract

A review of recent development in the deposition of II–VI and III–VI compound semiconductors by MOCVD methods using single-compound precursors is presented. The use of such precursors is placed in the context of the potential technological importance of these materials and relevant aspects of conventional MOCVD.