Langmuir probe measurements of the electron energy distribution function in radio-frequency plasmas

Publisher Website

1 July 1992

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology A

Vol. 10 (4), 1207-1211
https://doi.org/10.1116/1.578228

Abstract

No abstract available

Keywords

RADIO FREQUENCY

Cited by 30 articles