Role of Gas Doping Sequence in Surface Reactions and Dopant Incorporation during Atomic Layer Deposition of Al-Doped ZnO
- 5 November 2009
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 21 (23), 5585-5593
- https://doi.org/10.1021/cm901404p
Abstract
No abstract availableKeywords
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