Formation and observation of 50 nm polarized domains in PbZr1−xTixO3 thin film using scanning probe microscope

Abstract

Nanometer size polarized domains were written in a PbZr_1−xTi_xO₃ (PZT) thin film using an atomic force microscope (AFM) and the relationship between the polarized domain and the grain of the film was investigated. The polarized domain was formed by applying a pulse voltage to the ferroelectric PZT thin film through a conductive AFM tip. The polarized domain structure was observed by imaging the piezoelectric‐induced surface vibration by an AFM with an ac voltage applied between the tip and the bottom electrode of a sample. The polarized domains with a diameter of 50 nm were written within a single grain.