Direct inclusion of the proximity effect in the calculation of kinoforms
- 1 August 1994
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 33 (22), 4993-4996
- https://doi.org/10.1364/ao.33.004993
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.This publication has 1 reference indexed in Scilit:
- Methods for proximity effect correction in electron lithographyJournal of Vacuum Science & Technology B, 1990