Crater-edge profiling in interface analysis employing ion-beam etching and AES
- 15 October 1976
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 29 (8), 497-499
- https://doi.org/10.1063/1.89136
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- An Auger analysis of the SiO2-Si interfaceJournal of Applied Physics, 1976