Low-temperature metalorganic chemical vapor deposition of perovskite Pb(ZrxTi1−x)O3 thin films
- 6 July 1992
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 61 (1), 16-18
- https://doi.org/10.1063/1.107646
Abstract
Pb(ZrxTi1−x)O3 thin films with perovskite structure were successfully prepared on sapphire disks, Pt/Ti/SiO2/Si, and RuOx/SiO2/Si substrates at temperatures as low as 550 °C by hot‐wall metalorganic chemical vapor deposition. Safe and stable precursors were used, namely: lead tetramethylheptadione [Pb(thd)2], zirconium tetramethylheptadione [Zr(thd)4], and titanium ethoxide. The deposition rates were in the range of 10.0 to 20.0 nm/min. The Auger electron spectroscopy (AES) depth profile showed good uniformity across the bulk of the films. The AES spectra also showed no carbon contamination in the bulk of the films. Zr/Ti ratio were easily controlled by the precursor temperatures and the flow rate of diluent gas. Optical constants were measured by a UV‐VIS‐NIR spectrophotometer. As‐deposited films were dense and showed uniform and fine grain size. The 600 °C annealed film (Pb/Zr/Ti=50/41/9) showed a spontaneous polarization of 23.3 μC/cm3 and a coercive field of 64.5 kV/cm.Keywords
This publication has 7 references indexed in Scilit:
- In situ deposition of epitaxial PbZrxTi(1−x)O3 thin films by pulsed laser depositionApplied Physics Letters, 1991
- Preparation and electrical properties of MOCVD-deposited PZT thin filmsJournal of Applied Physics, 1991
- Preparation of epitaxial Pb(ZrxTi1−x)O3 thin films and their crystallographic, pyroelectric, and ferroelectric propertiesJournal of Applied Physics, 1989
- Structure, Composition, and Properties of Mocvd ZrO2 Thin FilmsMRS Proceedings, 1989
- Ion-beam deposition of thin films of ferroelectric lead zirconate titanate (PZT)Journal of Applied Physics, 1979
- A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing thin filmJournal of Physics E: Scientific Instruments, 1976
- Preparation of Pb(Zr,Ti)O3 thin films by an electron beam evaporation techniqueApplied Physics Letters, 1976