Thickness dependence of elastic modulus and hardness of on-wafer low-k ultrathin polytetrafluoroethylene films
- 22 March 2000
- journal article
- Published by Elsevier in Scripta Materialia
- Vol. 42 (7), 687-694
- https://doi.org/10.1016/s1359-6462(99)00421-2
Abstract
No abstract availableKeywords
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