Plasma deposition of metal oxide films for integrated optics
- 1 January 1986
- Vol. 36 (1-3), 139-142
- https://doi.org/10.1016/0042-207x(86)90288-5
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Thin film optical waveguides fabricated by ion- assisted techniquesThin Solid Films, 1981