Deposition of Metallic Films by Electron Impact Decomposition of Organometallic Vapors

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1 April 1961

journal article
research article
Published by AIP Publishing in Review of Scientific Instruments

Vol. 32 (4), 458
https://doi.org/10.1063/1.1717408

Abstract

No abstract available

Keywords

ELECTRON IMPACT

Cited by 25 articles