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Deposition of Metallic Films by Electron Impact Decomposition of Organometallic Vapors
Home
Publications
Deposition of Metallic Films by Electron Impact Decomposition of Organometallic Vapors
Deposition of Metallic Films by Electron Impact Decomposition of Organometallic Vapors
AB
Allen G. Baker
Allen G. Baker
WM
William C. Morris
William C. Morris
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1 April 1961
journal article
research article
Published by
AIP Publishing
in
Review of Scientific Instruments
Vol. 32
(4)
,
458
https://doi.org/10.1063/1.1717408
Abstract
No abstract available
Keywords
ELECTRON IMPACT
Cited by 25 articles