A maskless post-CMOS bulk micromachining process and its application
- 14 November 2005
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (12), 2366-2371
- https://doi.org/10.1088/0960-1317/15/12/019
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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