Monolithically integrated micromachined RF MEMS capacitive switches
- 1 March 2001
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 89 (1-2), 88-94
- https://doi.org/10.1016/s0924-4247(00)00549-5
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Characteristics of micromachined switches at microwave frequenciesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micromachined low-loss microwave switchesJournal of Microelectromechanical Systems, 1999
- Fabrication of micromechanical switches for routing radio frequency signalsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996