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Electrical properties of thermal oxides on GaAs
Home
Publications
Electrical properties of thermal oxides on GaAs
Electrical properties of thermal oxides on GaAs
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D.N. Butcher
D.N. Butcher
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B.J. Sealy
B.J. Sealy
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1 January 1977
journal article
Published by
Institution of Engineering and Technology (IET)
in
Electronics Letters
Vol. 13
(19)
,
558-559
https://doi.org/10.1049/el:19770400
Abstract
The growth and electrical properties of oxides grown on GaAs at 510°C have been studied. Results show that growth with time follows a parabolic law and that electrical properties are, in general, very different from those of oxides grown anodically.
Keywords
ELECTRICAL PROPERTIES
GAAS
THIN FILMS
OXIDATION
THERMAL OXIDES
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Open Access
Cited by 27 articles