Stress in Thin Films of Silane Vapor-Deposited Silicon Dioxide

Publisher Website

1 January 1969

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 116 (5), 620
https://doi.org/10.1149/1.2411987

Abstract

No abstract available

Keywords

THIN FILM

Cited by 20 articles