Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask
- 13 September 1999
- journal article
- research article
- Published by Elsevier in Thin Solid Films
- Vol. 352 (1-2), 9-12
- https://doi.org/10.1016/s0040-6090(99)00404-6
Abstract
No abstract availableKeywords
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- Single photomask, multilevel kinoforms in quartz and photoresist: manufacture and evaluationApplied Optics, 1990