Indentation load relaxation experiments with indentation depth in the submicron range
- 1 October 1990
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 5 (10), 2100-2106
- https://doi.org/10.1557/jmr.1990.2100
Abstract
Indentation load relaxation (ILR) experiments with indentation depths in the submicron range are described. Under appropriate conditions, the ILR data are found to yield flow curves of the same shape as those based on conventional load relaxation data. Variations in flow properties as a function of depth in submicron metal films deposited on a hard substrate are detected by the experiments described.Keywords
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