Stress and microhardness in sputter deposited molybdenum and chromium films

Publisher Website

1 September 1992

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology A

Vol. 10 (5), 3278-3282
https://doi.org/10.1116/1.577855

Abstract

No abstract available

Keywords

CHROMIUM

Cited by 14 articles