Sputtering of Tantalum Metal onto Teflon
- 1 July 1970
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 41 (7), 1110
- https://doi.org/10.1063/1.1684718
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- On the Cleaning of SurfacesReview of Scientific Instruments, 1935