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Oxidation behaviour of TiAlN coatings sputtered at low temperature
Home
Publications
Oxidation behaviour of TiAlN coatings sputtered at low temperature
Oxidation behaviour of TiAlN coatings sputtered at low temperature
Peter Panjan
Peter Panjan
BN
Boris Navinšek
Boris Navinšek
MČ
Miha Čekada
Miha Čekada
AZ
Anton Zalar
Anton Zalar
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1 May 1999
journal article
Published by
Elsevier
in
Vacuum
Vol. 53
(1-2)
,
127-131
https://doi.org/10.1016/s0042-207x(98)00407-2
Abstract
No abstract available
Keywords
REACTIVE SPUTTER DEPOSITION
HARD COATINGS
LOW TEMPERATURE COATINGS
OXIDATION RESISTANCE
CROSS SECTION
SCANNING ELECTRON MICROSCOPY
SILICON WAFER
Cited by 52 articles