A small scale ratio frequency sputtering apparatus
- 1 September 1967
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 1 (2), 165-169
- https://doi.org/10.1016/0040-6090(67)90012-0
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Dielectric Thin Films through rf SputteringJournal of Applied Physics, 1966
- Sputtering of Dielectrics by High-Frequency FieldsJournal of Applied Physics, 1962
- On the Preparation of Hard Oxide Films with Precisely Controlled Thickness on Evaporated Aluminum Mirrors*Journal of the Optical Society of America, 1949